Potts, SE;
Profijt, HB;
Roelofs, R;
Kessels, E;
(2012)
Room-Temperature ALD of Metal Oxide Thin Films by Energy-Enhanced ALD.
Presented at: 222nd Electrochemical Society Meeting, Honolulu, HI, USA.
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| Type: | Conference item (Presentation) |
|---|---|
| Title: | Room-Temperature ALD of Metal Oxide Thin Films by Energy-Enhanced ALD |
| Event: | 222nd Electrochemical Society Meeting |
| Location: | Honolulu, HI, USA |
| Dates: | 07 - 12 October 2012 |
| Open access status: | An open access version is available from UCL Discovery |
| Publisher version: | https://www.electrochem.org/past-meetings/ |
| Language: | English |
| UCL classification: | UCL UCL > Provost and Vice Provost Offices > UCL BEAMS UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences > Dept of Chemistry |
| URI: | https://discovery.ucl.ac.uk/id/eprint/10114894 |
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