Potts, SE;
Profijt, HB;
Roelofs, R;
Kessels, E;
(2012)
Room-Temperature ALD of Metal Oxide Thin Films by Energy-Enhanced ALD.
Presented at: 222nd Electrochemical Society Meeting, Honolulu, HI, USA.
Preview |
Text (Abstract)
Potts_SEPotts_ECS2012_Abstract.pdf Download (115kB) | Preview |
Preview |
Text (Presentation)
SEPotts_ECS2012_Final.pdf - Submitted Version Download (570kB) | Preview |
| Type: | Conference item (Presentation) |
|---|---|
| Title: | Room-Temperature ALD of Metal Oxide Thin Films by Energy-Enhanced ALD |
| Event: | 222nd Electrochemical Society Meeting |
| Location: | Honolulu, HI, USA |
| Dates: | 07 - 12 October 2012 |
| Open access status: | An open access version is available from UCL Discovery |
| Publisher version: | https://www.electrochem.org/past-meetings/ |
| Language: | English |
| UCL classification: | UCL UCL > Provost and Vice Provost Offices > UCL BEAMS UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences > Dept of Chemistry |
| URI: | https://discovery.ucl.ac.uk/id/eprint/10114894 |
Downloads since deposit
Loading...Download activity - last month
Loading...Download activity - last 12 months
Loading...Downloads by country - last 12 months
| 1. |  United States | 28 |
| 2. |  China | 25 |
| 3. |  Korea, Republic of | 13 |
| 4. |  Taiwan | 11 |
| 5. |  Germany | 6 |
| 6. |  Russian Federation | 5 |
| 7. |  Japan | 5 |
| 8. |  United Kingdom | 5 |
| 9. |  France | 3 |
| 10. |  Brazil | 2 |
Archive Staff Only
 |
View Item |
