Patel, T;
Li, B;
Li, T;
Wang, R;
Gallop, JC;
Cox, DC;
Chen, J;
... Hao, L; + view all
(2017)
Toward the Use of NanoSQUIDs to Measure the Displacement of an NEMS Resonator.
IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY
, 27
(4)
10.1109/TASC.2017.2667404.
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Abstract
We discuss steps toward the readout of the position of a nanoelectromagnetic system (NEMS) beam resonator using a Nb nanosuperconducting quantum interference device (nanoSQUID). We describe our fabrication procedure for coupling the nanoSQUID and a suspended Al-coated Si3N4 NEMS resonator together by a combination of focused ion beam lithography and nanomanipulation. We discuss typical electrical characteristics of the integrated devices, and independent postfabrication atomic force microscope nanoindentation measurements of the elastic properties of the integrated resonator to estimate its natural frequencies of vibration. We compare and discuss the response of a nanoSQUID with current-carrying and superconducting screening (noncurrent carrying) modes of operation of the resonator.
| Type: | Article |
|---|---|
| Title: | Toward the Use of NanoSQUIDs to Measure the Displacement of an NEMS Resonator |
| Open access status: | An open access version is available from UCL Discovery |
| DOI: | 10.1109/TASC.2017.2667404 |
| Publisher version: | http://dx.doi.org/10.1109/TASC.2017.2667404 |
| Additional information: | This work is licensed under a Creative Commons Attribution 3.0 License. For more information, see http://creativecommons.org/licenses/by/3.0/ |
| Keywords: | Science & Technology, Technology, Physical Sciences, Engineering, Electrical & Electronic, Physics, Applied, Engineering, Physics, NanoSQUIDs, SQUIDs, nanoelectromechanical systems, NEMS, flux coupling, nanomechanical resonator, SINGLE, MOTION |
| UCL classification: | UCL UCL > Provost and Vice Provost Offices > UCL BEAMS UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Engineering Science UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Engineering Science > Dept of Electronic and Electrical Eng UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences > Dept of Science and Technology Studies |
| URI: | https://discovery.ucl.ac.uk/id/eprint/1566781 |
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