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Magnesium Oxide Thin Films with Tunable Crystallographic Preferred Orientation via Aerosol-Assisted CVD

Ponja, SD; Parkin, IP; Carmalt, CJ; (2015) Magnesium Oxide Thin Films with Tunable Crystallographic Preferred Orientation via Aerosol-Assisted CVD. Chemical Vapor Deposition , 21 (4-5-6) 145 - 149. 10.1002/cvde.201507156. Green open access

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Abstract

Magnesium oxide films are deposited on glass via aerosol-assisted (AA)CVD. Depositions using magnesium acetate tetrahydrate in ethanol or methanol are carried out at 400, 500, and 600 °C. Films are analyzed by various methods. Growth rate, film thickness, and crystallite size increase with temperature, regardless of solvent. The films are crystalline and the crystallographic preferred orientation varies with solvent and temperature, allowing fine-tuning for industrial applications. Solvent and temperature influence the surface morphology; films deposited using ethanol consist of small surface structures compared to the featureless morphology of methanol-derived films. The refractive index of the films is 1.72 for methanol and 1.70 for ethanol systems.

Type: Article
Title: Magnesium Oxide Thin Films with Tunable Crystallographic Preferred Orientation via Aerosol-Assisted CVD
Open access status: An open access version is available from UCL Discovery
DOI: 10.1002/cvde.201507156
Publisher version: http://dx.doi.org/10.1002/cvde.201507156
Language: English
Additional information: This is the peer reviewed version of the following article: Ponja, SD; Parkin, IP; Carmalt, CJ; (2015) Magnesium Oxide Thin Films with Tunable Crystallographic Preferred Orientation via Aerosol-Assisted CVD. Chemical Vapor Deposition , 21 (4-5-6) 145 - 149., which has been published in final form at http://dx.doi.org/10.1002/cvde.201507156. This article may be used for non-commercial purposes in accordance with Wiley Terms and Conditions for Self-Archiving. http://olabout.wiley.com/WileyCDA/Section/id-820227.html#terms
Keywords: Dielectrics, MgO, Refractive index, Solvent effects
UCL classification: UCL
UCL > Provost and Vice Provost Offices > UCL BEAMS
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences > Dept of Chemistry
URI: https://discovery.ucl.ac.uk/id/eprint/1469686
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