Suwito, Galih R;
Haffouz, Sofiane;
Dalacu, Dan;
Poole, Philip J;
Quitoriano, Nathaniel J;
(2024)
Nucleation of InP on Si under micro-crucibles at ultra-high vacuum using a two-step VLS process.
Journal of Physics D: Applied Physics
, 57
(41)
, Article 415101. 10.1088/1361-6463/ad5f38.
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Abstract
We reported nucleation mechanisms of InP directly on Si (8% lattice mismatch) under confined structures, called micro-crucibles, at ultra-high vacuum (UHV) by chemical beam epitaxy. These micro-crucibles are used to induce lateral growth in the presence of a micro-scale Au catalyst. It is found that at this UHV condition, the kinetics is dictated predominantly by adatom surface diffusion. Using a two-step growth process ((1) In-only exposure, then, (2) simultaneous In and P exposures), InP islands have been successfully nucleated on Si substrates under micro-crucible structures. The nucleation of these InP islands strongly depends on the metal catalyst location relative to the micro-crucible opening with metal catalysts residing closer to the opening having a higher chance to get incorporated with In and P atoms. Importantly, we found that using smaller micro-crucibles with double openings can increase the possibility of having metal catalysts reside near either opening and nucleate InP under micro-crucibles.
| Type: | Article |
|---|---|
| Title: | Nucleation of InP on Si under micro-crucibles at ultra-high vacuum using a two-step VLS process |
| Open access status: | An open access version is available from UCL Discovery |
| DOI: | 10.1088/1361-6463/ad5f38 |
| Publisher version: | https://doi.org/10.1088/1361-6463/ad5f38 |
| Language: | English |
| Additional information: | Original content from this work may be used under the terms of the Creative Commons Attribution 4.0 license. Any further distribution of this work must maintain attribution to the author(s) and the title of the work, journal citation and DOI. |
| UCL classification: | UCL UCL > Provost and Vice Provost Offices > UCL BEAMS UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Engineering Science > Dept of Electronic and Electrical Eng |
| URI: | https://discovery.ucl.ac.uk/id/eprint/10219535 |
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