Bustamante, José; Miyahara, Yoichi; Fairgrieve-Park, Logan; Spruce, Kieran; See, Patrick; Curson, Neil; Stock, Taylor JZ; Bustamante, José; Miyahara, Yoichi; Fairgrieve-Park, Logan; Spruce, Kieran; See, Patrick; Curson, Neil; Stock, Taylor JZ; Grutter, Peter; - view fewer (2024) Needle in a haystack: Efficiently finding atomically defined quantum dots for electrostatic force microscopy. Review of Scientific Instruments , 95 (8) , Article 083709. 10.1063/5.0208571.

Text 083709_1_5.0208571.pdf - Published Version Access restricted to UCL open access staff until 24 August 2025. Download (17MB)

Abstract

The ongoing development of single electron, nano-, and atomic scale semiconductor devices would greatly benefit from a characterization tool capable of detecting single electron charging events with high spatial resolution at low temperatures. In this work, we introduce a novel Atomic Force Microscope (AFM) instrument capable of measuring critical device dimensions, surface roughness, electrical surface potential, and ultimately the energy levels of quantum dots and single electron transistors in ultra miniaturized semiconductor devices. The characterization of nanofabricated devices with this type of instrument presents a challenge: finding the device. We, therefore, also present a process to efficiently find a nanometer sized quantum dot buried in a 10 × 10 mm2 silicon sample using a combination of optical positioning, capacitive sensors, and AFM topography in a vacuum.

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