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Deep UV transparent conductive oxide thin films realized through degenerately doped wide-bandgap gallium oxide

Zhang, Jiaye; Willis, Joe; Yang, Zhenni; Lian, Xu; Chen, Wei; Wang, Lai-Sen; Xu, Xiangyu; ... Zhang, Kelvin HL; + view all (2022) Deep UV transparent conductive oxide thin films realized through degenerately doped wide-bandgap gallium oxide. Cell Reports Physical Science , 3 (3) , Article 100801. 10.1016/j.xcrp.2022.100801. Green open access

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Abstract

Deep UV transparent thin films have recently attracted considerable attention owing to their potential in UV and organic-based optoelectronics. Here, we report the achievement of a deep UV transparent and highly conductive thin film based on Si-doped Ga_{2}O_{3} (SGO) with high conductivity of 2500 S/cm. The SGO thin films exhibit high transparency over a wide spectrum ranging from visible light to deep UV wavelength and, meanwhile, have a very low work-function of approximately 3.2 eV. A combination of photoemission spectroscopy and theoretical studies reveals that the delocalized conduction band derived from Ga 4s orbitals is responsible for the Ga_{2}O_{3} films’ high conductivity. Furthermore, Si is shown to act as an efficient shallow donor, yielding high mobility up to approximately 60 cm^{2}/Vs. The superior optoelectronic properties of SGO films make it a promising material for use as electrodes in high-power electronics and deep UV and organic-based optoelectronic devices.

Type: Article
Title: Deep UV transparent conductive oxide thin films realized through degenerately doped wide-bandgap gallium oxide
Open access status: An open access version is available from UCL Discovery
DOI: 10.1016/j.xcrp.2022.100801
Publisher version: https://doi.org/10.1016/j.xcrp.2022.100801
Language: English
Additional information: © The Author 2022. Original content in this article is licensed under the terms of the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International (CC BY-NC-ND 4.0) Licence (https://creativecommons.org/licenses/by-nc-nd/4.0/).
Keywords: wide-bandgap semiconductor, Ga_{2}O_{3}, electronic structure, transparent conducting oxide, work-function
UCL classification: UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Engineering Science
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Engineering Science > Engineering Science Faculty Office
UCL > Provost and Vice Provost Offices > UCL BEAMS
UCL
URI: https://discovery.ucl.ac.uk/id/eprint/10145864
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