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X-ray Phase-Contrast Imaging and Metrology through Unified Modulated Pattern Analysis

Zdora, M-C; Thibault, P; Zhou, T; Koch, FJ; Romell, J; Sala, S; Last, A; ... Zanette, I; + view all (2017) X-ray Phase-Contrast Imaging and Metrology through Unified Modulated Pattern Analysis. Physical Review Letters , 118 (20) , Article 203903. 10.1103/PhysRevLett.118.203903. Green open access

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Abstract

We present a method for x-ray phase-contrast imaging and metrology applications based on the sample-induced modulation and subsequent computational demodulation of a random or periodic reference interference pattern. The proposed unified modulated pattern analysis (UMPA) technique is a versatile approach and allows tuning of signal sensitivity, spatial resolution, and scan time. We characterize the method and demonstrate its potential for high-sensitivity, quantitative phase imaging, and metrology to overcome the limitations of existing methods.

Type: Article
Title: X-ray Phase-Contrast Imaging and Metrology through Unified Modulated Pattern Analysis
Open access status: An open access version is available from UCL Discovery
DOI: 10.1103/PhysRevLett.118.203903
Publisher version: http://dx.doi.org/10.1103/PhysRevLett.118.203903
Language: English
Additional information: Published by the American Physical Society under the terms of the Creative Commons Attribution 4.0 International license. Further distribution of this work must maintain attribution to the author(s) and the published article’s title, journal citation, and DOI.
Keywords: TALBOT-LAU INTERFEROMETRY, GRATING INTERFEROMETER, SYNCHROTRON-RADIATION, COMPUTED-TOMOGRAPHY, RETRIEVAL, SPECKLE, LENSES, TRANSMISSION, FABRICATION, MICROSCOPY
UCL classification: UCL
UCL > Provost and Vice Provost Offices > UCL BEAMS
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences
URI: https://discovery.ucl.ac.uk/id/eprint/10119386
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