Zdora, M-C;
Thibault, P;
Zhou, T;
Koch, FJ;
Romell, J;
Sala, S;
Last, A;
... Zanette, I; + view all
(2017)
X-ray Phase-Contrast Imaging and Metrology through Unified Modulated Pattern Analysis.
Physical Review Letters
, 118
(20)
, Article 203903. 10.1103/PhysRevLett.118.203903.
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Abstract
We present a method for x-ray phase-contrast imaging and metrology applications based on the sample-induced modulation and subsequent computational demodulation of a random or periodic reference interference pattern. The proposed unified modulated pattern analysis (UMPA) technique is a versatile approach and allows tuning of signal sensitivity, spatial resolution, and scan time. We characterize the method and demonstrate its potential for high-sensitivity, quantitative phase imaging, and metrology to overcome the limitations of existing methods.
Type: | Article |
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Title: | X-ray Phase-Contrast Imaging and Metrology through Unified Modulated Pattern Analysis |
Open access status: | An open access version is available from UCL Discovery |
DOI: | 10.1103/PhysRevLett.118.203903 |
Publisher version: | http://dx.doi.org/10.1103/PhysRevLett.118.203903 |
Language: | English |
Additional information: | Published by the American Physical Society under the terms of the Creative Commons Attribution 4.0 International license. Further distribution of this work must maintain attribution to the author(s) and the published article’s title, journal citation, and DOI. |
Keywords: | TALBOT-LAU INTERFEROMETRY, GRATING INTERFEROMETER, SYNCHROTRON-RADIATION, COMPUTED-TOMOGRAPHY, RETRIEVAL, SPECKLE, LENSES, TRANSMISSION, FABRICATION, MICROSCOPY |
UCL classification: | UCL UCL > Provost and Vice Provost Offices > UCL BEAMS UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences |
URI: | https://discovery.ucl.ac.uk/id/eprint/10119386 |
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