Potts, SE;
Van den Elzen, LRJG;
Dingemans, G;
Langereis, E;
Keuning, W;
Van de Sanden, MCM;
Kessels, WMM;
(2009)
Low Temperature Plasma-Enhanced ALD of Metal Oxide Thin Films.
Presented at: Baltic ALD Conference 2009, Uppsala, Sweden.
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| Type: | Conference item (Presentation) |
|---|---|
| Title: | Low Temperature Plasma-Enhanced ALD of Metal Oxide Thin Films |
| Event: | Baltic ALD Conference 2009 |
| Location: | Uppsala, Sweden |
| Dates: | 15 - 16 June 2009 |
| Open access status: | An open access version is available from UCL Discovery |
| Publisher version: | http://aldhistory.blogspot.com/p/ald-conferences.h... |
| Language: | English |
| UCL classification: | UCL UCL > Provost and Vice Provost Offices > UCL BEAMS UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences > Dept of Chemistry |
| URI: | https://discovery.ucl.ac.uk/id/eprint/10114903 |
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