Potts, SE;
Leick, N;
Kessels, E;
Zydor, A;
Elliott, SD;
(2011)
Plasma-Enhanced ALD of TiO₂ using Cp-Based Precursors: Experiments and DFT Calculations.
Presented at: AVS ALD Conference 2011, Cambridge, MA, USA.
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| Type: | Conference item (Presentation) |
|---|---|
| Title: | Plasma-Enhanced ALD of TiO₂ using Cp-Based Precursors: Experiments and DFT Calculations |
| Event: | AVS ALD Conference 2011 |
| Location: | Cambridge, MA, USA |
| Dates: | 26 - 29 June 2011 |
| Open access status: | An open access version is available from UCL Discovery |
| Publisher version: | https://www.pathlms.com/avstechnicallibrary/events... |
| Language: | English |
| UCL classification: | UCL UCL > Provost and Vice Provost Offices > UCL BEAMS UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences > Dept of Chemistry |
| URI: | https://discovery.ucl.ac.uk/id/eprint/10114898 |
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