Potts, SE;
Lachaud, C;
Lahootun, V;
Hong, J;
Madec, A;
Kessels, E;
(2012)
New, Non-Pyrophoric Al-Precursor for the ALD of Al₂O₃: Influence of Purity Grade on Silicon Surface Passivation.
Presented at: EU-PVSEC 2012, Frankfurt, Germany.
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Text (Poster)
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| Type: | Poster |
|---|---|
| Title: | New, Non-Pyrophoric Al-Precursor for the ALD of Al₂O₃: Influence of Purity Grade on Silicon Surface Passivation |
| Event: | EU-PVSEC 2012 |
| Location: | Frankfurt, Germany |
| Dates: | 24 - 28 September 2012 |
| Open access status: | An open access version is available from UCL Discovery |
| Publisher version: | https://doi.org/10.4229/27thEUPVSEC2012-2AV.5.24 |
| Language: | English |
| UCL classification: | UCL UCL > Provost and Vice Provost Offices > UCL BEAMS UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences > Dept of Chemistry |
| URI: | https://discovery.ucl.ac.uk/id/eprint/10114893 |
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