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Experimental study of the sensitivity of a porous silicon ring resonator sensor using continuous in-flow measurements

Caroselli, R; Ponce-Alcantara, S; Prats Quilez, F; Martin Sanchez, D; Torrijos Moran, L; Griol Barres, A; Bellieres, L; ... Garcia-Ruperez, J; + view all (2017) Experimental study of the sensitivity of a porous silicon ring resonator sensor using continuous in-flow measurements. Optics Express , 25 (25) pp. 31651-31659. 10.1364/OE.25.031651. Green open access

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Abstract

A highly sensitive photonic sensor based on a porous silicon ring resonator was developed and experimentally characterized. The photonic sensing structure was fabricated by exploiting a porous silicon double layer, where the top layer of a low porosity was used to form photonic elements by e-beam lithography and the bottom layer of a high porosity was used to confine light in the vertical direction. The sensing performance of the ring resonator sensor based on porous silicon was compared for the different resonances within the analyzed wavelength range both for transverse-electric and transverse-magnetic polarizations. We determined that a sensitivity up to 439 nm/RIU for low refractive index changes can be achieved depending on the optical field distribution given by each resonance/polarization.

Type: Article
Title: Experimental study of the sensitivity of a porous silicon ring resonator sensor using continuous in-flow measurements
Open access status: An open access version is available from UCL Discovery
DOI: 10.1364/OE.25.031651
Publisher version: https://doi.org/10.1364/OE.25.031651
Language: English
Additional information: © 2017 Optical Society of America under the terms of the OSA Open Access Publishing Agreement (https://doi.org/10.1364/OA_License_v1).
Keywords: (130.3120) Integrated optics devices; (130.6010) Sensors; (230.5750) Resonators.
UCL classification: UCL
UCL > Provost and Vice Provost Offices > UCL BEAMS
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Engineering Science
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Engineering Science > Dept of Med Phys and Biomedical Eng
URI: https://discovery.ucl.ac.uk/id/eprint/10083000
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