Wachulak, PW;
Torrisi, A;
Bartnik, A;
Węgrzyński, Ł;
Fok, T;
Fiedorowicz, H;
(2017)
A desktop extreme ultraviolet microscope based on a compact laser-plasma light source.
Applied Physics B: Lasers and Optics
, 123
, Article 25. 10.1007/s00340-016-6595-5.
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Abstract
A compact, desktop size microscope, based on laser-plasma source and equipped with reflective condenser and diffractive Fresnel zone plate objective, operating in the extreme ultraviolet (EUV) region at the wavelength of 13.8 nm, was developed. The microscope is capable of capturing magnified images of objects with 95-nm full-pitch spatial resolution (48 nm 25–75% KE) and exposure time as low as a few seconds, combining reasonable acquisition conditions with stand-alone desktop footprint. Such EUV microscope can be regarded as a complementary imaging tool to already existing, well-established ones. Details about the microscope, characterization, resolution estimation and real sample images are presented and discussed.
| Type: | Article |
|---|---|
| Title: | A desktop extreme ultraviolet microscope based on a compact laser-plasma light source |
| Open access status: | An open access version is available from UCL Discovery |
| DOI: | 10.1007/s00340-016-6595-5 |
| Publisher version: | http://doi.org/10.1007/s00340-016-6595-5 |
| Language: | English |
| Additional information: | Copyright © The Author(s) 2016 Open Access This article is distributed under the terms of the Creative Commons Attribution 4.0 International License (http://creativecommons.org/licenses/by/4.0/), which permits unrestricted use, distribution, and reproduction in any medium, provided you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. |
| UCL classification: | UCL UCL > Provost and Vice Provost Offices > UCL BEAMS UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Engineering Science |
| URI: | https://discovery.ucl.ac.uk/id/eprint/10024983 |
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