Wachulak, P;
Torrisi, A;
Ayele, M;
Bartnik, A;
Czwartos, J;
Wȩgrzyński, L;
Fok, T;
... Fiedorowicz, H; + view all
(2017)
Soft x-ray imaging with incoherent sources.
In: Klisnick, A and Menoni, CS, (eds.)
X-ray Lasers and Coherent X-ray Sources: Development and Applications.
(pp. 102430O1-102430O9).
Society of Photo-Optical Instrumentation Engineers (SPIE)
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Abstract
In this work we present experimental, compact desk-top SXR microscope, the EUV microscope which is at this stage a technology demonstrator, and finally, the SXR contact microscope. The systems are based on laser-plasma EUV and SXR sources, employing a double stream gas puff target. The EUV and SXR full field microscopes, operating at 13.8 nm and 2.88 nm wavelengths, respectively, are capable of imaging nanostructures with a sub-50 nm spatial resolution with relatively short (seconds) exposure times. The SXR contact microscope operates in the "water-window" spectral range, to produce an imprint of the internal structure of the sample in a thin layer of SXR light sensitive photoresist. Applications of such desk-top EUV and SXR microscopes for studies of variety of different samples - test objects for resolution assessment and other objects such as carbon membranes, DNA plasmid samples, organic and inorganic thin layers, diatoms, algae and carcinoma cells, are also presented. Details about the sources, the microscopes as well as the imaging results for various objects will be presented and discussed. The de velopment of such compact imaging systems may be important to the new research related to biological, material science and nanotechnology applications.
| Type: | Proceedings paper |
|---|---|
| Title: | Soft x-ray imaging with incoherent sources |
| Event: | SPIE Optics + Optoelectronics: X-ray Lasers and Coherent X-ray Sources: Development and Applications, 24-27 April 2017, Prague, Czech Republic |
| ISBN-13: | 9781510609877 |
| Open access status: | An open access version is available from UCL Discovery |
| DOI: | 10.1117/12.2265093 |
| Publisher version: | http://dx.doi.org/10.1117/12.2265093 |
| Language: | English |
| Additional information: | This is the published version of record. For information on re-use, please refer to the publisher’s terms and conditions. |
| Keywords: | Gas puff target, Fresnel zone plates, EUV/SXR Microscopy, Contact microscopy, Imaging, Nanometer resolution |
| UCL classification: | UCL UCL > Provost and Vice Provost Offices > UCL BEAMS UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Engineering Science |
| URI: | https://discovery.ucl.ac.uk/id/eprint/10024874 |
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