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A single-source precursor approach to solution processed indium arsenide thin films

Marchand, P; Sathasivam, S; Williamson, BAD; Pugh, D; Bawaked, SM; Basahel, SN; Obaid, AY; ... Carmalt, CJ; + view all (2016) A single-source precursor approach to solution processed indium arsenide thin films. Journal of Materials Chemistry C , 4 pp. 6761-6768. 10.1039/C6TC02293F. Green open access

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Abstract

This paper reports the synthesis of the novel single-source precursor, [{(MeInAstBu)3}2(Me2InAs(tBu)H)2] and the subsequent first report of aerosol-assisted chemical vapour deposition of InAs thin films. Owing to the use of the single-source precursor, highly crystalline and stoichiometric films were grown at a relatively low deposition temperature of 450 °C. Core level XPS depth profiling studies showed some partial oxidation of the film surface, however this was self-limiting and disappeared on etch profiles. Valence band XPS analysis matched well with the simulated density of state spectrum. Hall effect measurements performed on the films showed that the films were n-type with promising resistivity (3.6 × 10−3 Ω cm) and carrier mobility (410 cm2 V−1 s−1) values despite growth on amorphous glass substrates.

Type: Article
Title: A single-source precursor approach to solution processed indium arsenide thin films
Open access status: An open access version is available from UCL Discovery
DOI: 10.1039/C6TC02293F
Publisher version: http://dx.doi.org/10.1039/C6TC02293F
Language: English
Additional information: This article is licensed under a Creative Commons Attribution 3.0. This license allows you to share, copy, distribute and transmit the work for personal and non-commercial use providing author and publisher attribution is clearly stated. Further details about CC BY licenses are available at: https://creativecommons.org/licenses/by/3.0/
UCL classification: UCL
UCL > Provost and Vice Provost Offices > UCL BEAMS
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences > Dept of Chemistry
URI: https://discovery.ucl.ac.uk/id/eprint/1503338
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