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Patterning of metal oxide thin films using a H₂/He atmospheric pressure plasma jet

Sener, ME; Sathasivam, S; Palgrave, R; Quesada Cabrera, R; Caruana, DJ; (2020) Patterning of metal oxide thin films using a H₂/He atmospheric pressure plasma jet. Green Chemistry , 22 (4) pp. 1406-1413. 10.1039/d0gc00080a. Green open access

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Abstract

A hydrogen-doped helium atmospheric pressure plasma jet (APPJ) is shown to be effective for the chemical reduction of metal oxides. Copper and tin oxide films (CuO and SnO2) show rapid (<2 seconds) and complete reduction to zero valence metal after exposure to the plasma jet, as revealed by X-ray photoelectron spectroscopy (XPS), Auger electron spectroscopy, and Raman spectroscopy. After a total residence time of the plasma jet of 100 seconds, titanium oxide (TiO2) produced a surface decorated with Ti2+, Ti3+ and Ti4+ with proportions of 16, 38 and 46 atom%, respectively, as determined by XPS peak integration. Similarly, with tungsten oxide (WO3), after exposure for a few seconds, W5+ was produced, yielding a deep blue electrically conductive coating. The treatment of these oxide films by this dielectric radio frequency (RF) barrier discharge plasma jet provides a level of redox conversion not seen in any other technique, particularly for TiO2, especially with a comparable power input. The precise nature of the reduction is unclear; however, the involvement of free electrons may have an important role in the reduction process.

Type: Article
Title: Patterning of metal oxide thin films using a H₂/He atmospheric pressure plasma jet
Open access status: An open access version is available from UCL Discovery
DOI: 10.1039/d0gc00080a
Publisher version: https://doi.org/10.1039/d0gc00080a
Language: English
Additional information: This article is licensed under a Creative Commons Attribution 3.0 Unported Licence (http://creativecommons.org/licenses/by/3.0/).
UCL classification: UCL
UCL > Provost and Vice Provost Offices > UCL BEAMS
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences > Dept of Chemistry
URI: https://discovery.ucl.ac.uk/id/eprint/10091460
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