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Highly conductive and transparent gallium doped zinc oxide thin films via chemical vapor deposition

Ponja, SD; Sathasivam, S; Parkin, IP; Carmalt, CJ; (2020) Highly conductive and transparent gallium doped zinc oxide thin films via chemical vapor deposition. Scientific Reports , 10 (1) , Article 638. 10.1038/s41598-020-57532-7. Green open access

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Abstract

Degenerately doped ZnO is seen as a potential substitute to the ubiquitous and expensive Sn doped In2O3 as a transparent electrode in optoelectronic devices. Here, highly conductive and transparent Ga doped ZnO thin films were grown via aerosol assisted chemical vapor deposition. The lowest resistivity (7.8 × 10-4 Ω.cm) and highest carrier concentration (4.23 × 1020 cm-3) ever reported for AACVD grown ZnO: Ga was achieved due to using oxygen poor growth conditions enabled by diethylzinc and triethylgallium precursors.

Type: Article
Title: Highly conductive and transparent gallium doped zinc oxide thin films via chemical vapor deposition
Location: England
Open access status: An open access version is available from UCL Discovery
DOI: 10.1038/s41598-020-57532-7
Publisher version: https://doi.org/10.1038/s41598-020-57532-7
Language: English
Additional information: This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/.
UCL classification: UCL
UCL > Provost and Vice Provost Offices > UCL BEAMS
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences > Dept of Chemistry
URI: https://discovery.ucl.ac.uk/id/eprint/10090750
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