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Control of Recoil Losses in Nanomechanical SiN Membrane Resonators

Borrielli, A; Marconi, L; Marin, F; Marino, F; Morana, B; Pandraud, G; Pontin, A; ... Bonaldi, M; + view all (2016) Control of Recoil Losses in Nanomechanical SiN Membrane Resonators. Physical Review B , 94 (12) , Article 121403(R). 10.1103/PhysRevB.94.121403. Green open access

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Abstract

In the context of a recoil damping analysis, we have designed and produced a membrane resonator equipped with a specific on-chip structure working as a "loss shield" for a circular membrane. In this device the vibrations of the membrane, with a quality factor of $10^7$, reach the limit set by the intrinsic dissipation in silicon nitride, for all the modes and regardless of the modal shape, also at low frequency. Guided by our theoretical model of the loss shield, we describe the design rationale of the device, which can be used as effective replacement of commercial membrane resonators in advanced optomechanical setups, also at cryogenic temperatures.

Type: Article
Title: Control of Recoil Losses in Nanomechanical SiN Membrane Resonators
Open access status: An open access version is available from UCL Discovery
DOI: 10.1103/PhysRevB.94.121403
Publisher version: http://dx.doi.org/10.1103/PhysRevB.94.121403
Language: English
Additional information: This is the published version of record. For information on re-use, please refer to the publisher’s terms and conditions.
UCL classification: UCL
UCL > Provost and Vice Provost Offices > UCL BEAMS
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences > Dept of Physics and Astronomy
URI: https://discovery.ucl.ac.uk/id/eprint/1521912
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