Hicks, M-L;
Pakpour-Tabrizi, AC;
Zuerbig, V;
Kirste, L;
Nebel, C;
Jackman, RB;
(2019)
Optimizing reactive ion etching to remove sub-surface polishing damage on diamond.
Journal of Applied Physics
, 125
(24)
, Article 244502. 10.1063/1.5094751.