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Lamb wave propagation in monocrystalline silicon wafers

Fromme, P; Pizzolato, M; Robyr, J-L; Masserey, B; (2018) Lamb wave propagation in monocrystalline silicon wafers. The Journal of the Acoustical Society of America , 143 , Article 287. 10.1121/1.5021256. Green open access

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Abstract

Monocrystalline silicon wafers are widely used in the photovoltaic industry for solar panels with high conversion efficiency. Guided ultrasonic waves offer the potential to efficiently detect micro-cracks in the thin wafers. Previous studies of ultrasonic wave propagation in silicon focused on effects of material anisotropy on bulk ultrasonic waves, but the dependence of the wave propagation characteristics on the material anisotropy is not well understood for Lamb waves. The phase slowness and beam skewing of the two fundamental Lamb wave modes A0 and S0 were investigated. Experimental measurements using contact wedge transducer excitation and laser measurement were conducted. Good agreement was found between the theoretically calculated angular dependency of the phase slowness and measurements for different propagation directions relative to the crystal orientation. Significant wave skew and beam widening was observed experimentally due to the anisotropy, especially for the S0 mode. Explicit finite element simulations were conducted to visualize and quantify the guided wave beam skew. Good agreement was found for the A0 mode, but a systematic discrepancy was observed for the S0 mode. These effects need to be considered for the non-destructive testing of wafers using guided waves.

Type: Article
Title: Lamb wave propagation in monocrystalline silicon wafers
Location: United States
Open access status: An open access version is available from UCL Discovery
DOI: 10.1121/1.5021256
Publisher version: https://doi.org/10.1121/1.5021256
Language: English
Additional information: Copyright 2018 Acoustical Society of America. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the Acoustical Society of America. The following article appeared in The Journal of the Acoustical Society of America 143, 287 (2018) and may be found at https://doi.org/10.1121/1.5021256. After it is published, it will be found at https://doi.org/10.1121/1.5021256. For JASA: http://scitation.aip.org/JASA; for JASA Express Letters: http://scitation.aip.org/JASA-EL; for Proceedings of Meetings on Acoustics: http://scitation.aip.org/POMA.
UCL classification: UCL > Provost and Vice Provost Offices
UCL > Provost and Vice Provost Offices > UCL BEAMS
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Engineering Science
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Engineering Science > Dept of Mechanical Engineering
URI: http://discovery.ucl.ac.uk/id/eprint/10042753
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