Hoogenboom, B.W.;
Frederix, P.L.T.;
Yang, J.L.;
Martin, S.;
Pellmont, Y.;
Steinacher, M.;
Zäch, S.;
... Hug, H.J.; + view all
(2005)
A Fabry–Perot interferometer for micrometer-sized cantilevers.
Applied Physics Letters
, 86
(7)
074101-1.
10.1063/1.1866229.
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Abstract
We have developed a Fabry-Perot interferometer detecting the deflection of micrometer-sized cantilevers and other micromechanical devices, at a working distance of 0.8 mm. At 1 MHz, a noise floor of fm/ rootHz is obtained. The detector is mounted on a piezo motor for three-axis alignment. The angular alignment is not critical. The interferometer can be operated in vacuum, air, and liquid. It is particularly suited for scanning force microscopy with small cantilevers, or with larger cantilevers simultaneously monitoring vertical and lateral forces.
| Type: | Article |
|---|---|
| Title: | A Fabry–Perot interferometer for micrometer-sized cantilevers |
| Open access status: | An open access version is available from UCL Discovery |
| DOI: | 10.1063/1.1866229 |
| Publisher version: | http://dx.doi.org/10.1063/1.1866229 |
| Language: | English |
| UCL classification: | UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences > Dept of Physics and Astronomy |
| URI: | https://discovery.ucl.ac.uk/id/eprint/9619 |
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