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Toward the Use of NanoSQUIDs to Measure the Displacement of an NEMS Resonator

Patel, T; Li, B; Li, T; Wang, R; Gallop, JC; Cox, DC; Chen, J; ... Hao, L; + view all (2017) Toward the Use of NanoSQUIDs to Measure the Displacement of an NEMS Resonator. IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY , 27 (4) 10.1109/TASC.2017.2667404. Green open access

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Abstract

We discuss steps toward the readout of the position of a nanoelectromagnetic system (NEMS) beam resonator using a Nb nanosuperconducting quantum interference device (nanoSQUID). We describe our fabrication procedure for coupling the nanoSQUID and a suspended Al-coated Si3N4 NEMS resonator together by a combination of focused ion beam lithography and nanomanipulation. We discuss typical electrical characteristics of the integrated devices, and independent postfabrication atomic force microscope nanoindentation measurements of the elastic properties of the integrated resonator to estimate its natural frequencies of vibration. We compare and discuss the response of a nanoSQUID with current-carrying and superconducting screening (noncurrent carrying) modes of operation of the resonator.

Type: Article
Title: Toward the Use of NanoSQUIDs to Measure the Displacement of an NEMS Resonator
Open access status: An open access version is available from UCL Discovery
DOI: 10.1109/TASC.2017.2667404
Publisher version: http://dx.doi.org/10.1109/TASC.2017.2667404
Additional information: This work is licensed under a Creative Commons Attribution 3.0 License. For more information, see http://creativecommons.org/licenses/by/3.0/
Keywords: Science & Technology, Technology, Physical Sciences, Engineering, Electrical & Electronic, Physics, Applied, Engineering, Physics, NanoSQUIDs, SQUIDs, nanoelectromechanical systems, NEMS, flux coupling, nanomechanical resonator, SINGLE, MOTION
UCL classification: UCL
UCL > Provost and Vice Provost Offices
UCL > Provost and Vice Provost Offices > UCL BEAMS
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Engineering Science
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Engineering Science > Dept of Electronic and Electrical Eng
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences > Dept of Science and Technology Studies
URI: https://discovery.ucl.ac.uk/id/eprint/1566781
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