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High frequency guided wave propagation in monocrystalline silicon wafers

Pizzolato, M; Masserey, B; Robyr, JL; Fromme, P; (2017) High frequency guided wave propagation in monocrystalline silicon wafers. In: Health Monitoring of Structural and Biological Systems 2017. Society of Photo-Optical Instrumentation Engineers (SPIE): Portland, Oregon, United States. Green open access

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Abstract

Monocrystalline silicon wafers are widely used in the photovoltaic industry for solar panels with high conversion efficiency. The cutting process can introduce micro-cracks in the thin wafers and lead to varying thickness. High frequency guided ultrasonic waves are considered for the structural monitoring of the wafers. The anisotropy of the monocrystalline silicon leads to variations of the wave characteristics, depending on the propagation direction relative to the crystal orientation. Full three-dimensional Finite Element simulations of the guided wave propagation were conducted to visualize and quantify these effects for a line source. The phase velocity (slowness) and skew angle of the two fundamental Lamb wave modes (first anti-symmetric mode A0 and first symmetric mode S0) for varying propagation directions relative to the crystal orientation were measured experimentally. Selective mode excitation was achieved using a contact piezoelectric transducer with a custom-made wedge and holder to achieve a controlled contact pressure. The out-of-plane component of the guided wave propagation was measured using a noncontact laser interferometer. Good agreement was found with the simulation results and theoretical predictions based on nominal material properties of the silicon wafer

Type: Proceedings paper
Title: High frequency guided wave propagation in monocrystalline silicon wafers
ISBN-13: 9781510608252
Open access status: An open access version is available from UCL Discovery
DOI: 10.1117/12.2260035
Publisher version: http://doi.org/10.1117/12.2260035
Language: English
Additional information: © (2017) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). This version is the version of record. For information on re-use, please refer to the publisher’s terms and conditions.
UCL classification: UCL
UCL > Provost and Vice Provost Offices
UCL > Provost and Vice Provost Offices > UCL BEAMS
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Engineering Science
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Engineering Science > Dept of Mechanical Engineering
URI: https://discovery.ucl.ac.uk/id/eprint/1562096
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