Powell, MJ;
Potter, DB;
Wilson, RL;
Darr, JA;
Parkin, IP;
Carmalt, CJ;
(2017)
Scaling aerosol assisted chemical vapour deposition: Exploring the relationship between growth rate and film properties.
Materials and Design
, 129
pp. 116-124.
10.1016/j.matdes.2017.05.017.
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Abstract
Thin films of fluorine doped tin oxide were deposited, by an aerosol assisted chemical vapour deposition route, to study the effect of scaling the growth rate. The effect of precursor concentration on the growth rate of the films and the properties of deposited films were compared. The films were characterised by X-ray diffraction, scanning electron microscopy, UV/vis spectroscopy, X-ray photoelectron spectroscopy and Hall effect measurements. A maximum film growth rate of ca. 100 nm min− 1 was observed, which is significantly faster than previously reported aerosol assisted studies. This method shows the ability of aerosol assisted methods to deliver high growth rates whilst maintaining the ease of doping and control over stoichiometry.
| Type: | Article |
|---|---|
| Title: | Scaling aerosol assisted chemical vapour deposition: Exploring the relationship between growth rate and film properties |
| Open access status: | An open access version is available from UCL Discovery |
| DOI: | 10.1016/j.matdes.2017.05.017 |
| Publisher version: | http://dx.doi.org/10.1016/j.matdes.2017.05.017 |
| Language: | English |
| Additional information: | © 2017 The Authors. Published by Elsevier Ltd. This is an open access article under the CC BY license (http://creativecommons.org/licenses/BY/4.0/). |
| Keywords: | Aerosol assisted CVD; Transparent conducting oxides; Materials processing |
| UCL classification: | UCL UCL > Provost and Vice Provost Offices > UCL BEAMS UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences > Dept of Chemistry |
| URI: | https://discovery.ucl.ac.uk/id/eprint/1557783 |
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