Mehonic, A;
Munde, MS;
Ng, WH;
Buckwell, M;
Montesi, L;
Bosman, M;
Shluger, AL;
(2017)
Intrinsic resistance switching in amorphous silicon oxide for high performance SiOx ReRAM devices.
Microelectronic Engineering
, 178
pp. 98-103.
10.1016/j.mee.2017.04.033.
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Abstract
In this paper, we present a study of intrinsic bipolar resistance switching in metal-oxide-metal silicon oxide ReRAM devices. Devices exhibit low electroforming voltages (typically − 2.6 V), low switching voltages (± 1 V for setting and resetting), excellent endurance of > 107 switching cycles, good state retention (at room temperature and after 1 h at 260 °C), and narrow distributions of switching voltages and resistance states. We analyse the microstructure of amorphous silicon oxide films and postulate that columnar growth, which results from sputter-deposition of the oxide on rough surfaces, enhances resistance switching behavior.
| Type: | Article |
|---|---|
| Title: | Intrinsic resistance switching in amorphous silicon oxide for high performance SiOx ReRAM devices |
| Location: | Potsdam, GERMANY |
| Open access status: | An open access version is available from UCL Discovery |
| DOI: | 10.1016/j.mee.2017.04.033 |
| Publisher version: | http://doi.org/10.1016/j.mee.2017.04.033 |
| Language: | English |
| Additional information: | © 2017 The Authors. Published by Elsevier B.V. This is an open access article under the CC BY license (http://creativecommons.org/licenses/by/4.0/). |
| Keywords: | Science & Technology, Technology, Physical Sciences, Engineering, Electrical & Electronic, Nanoscience & Nanotechnology, Optics, Physics, Applied, Engineering, Science & Technology - Other Topics, Physics, ReRAM, Silicon oxide, Intrinsic, Resistance switching, STEM, MEMRISTOR, MEMORIES |
| UCL classification: | UCL UCL > Provost and Vice Provost Offices > UCL BEAMS UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Engineering Science UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Engineering Science > Dept of Chemical Engineering UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Engineering Science > Dept of Electronic and Electrical Eng UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences > Dept of Physics and Astronomy |
| URI: | https://discovery.ucl.ac.uk/id/eprint/1554506 |
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