Manzi, JA;
Knapp, CE;
Parkin, IP;
Carmalt, CJ;
(2016)
Aerosol assisted chemical vapour deposition of transparent conductive aluminum-doped zinc oxide thin films from a zinc triflate precursor.
Thin Solid Films
, 616
pp. 477-481.
10.1016/j.tsf.2016.09.008.
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Abstract
The use of zinc triflate (trifluoromethanesulfonate), [Zn(OTf)2] as a precursor in the aerosol assisted chemical vapour deposition of zinc oxide thin films is described. Aluminum doped zinc oxide (AZO) thin films are also shown to be deposited when aluminum acetylacetonate [Al(acac)3] was introduced into the precursor solution, illustrating the versatility of this system. Film characterization techniques include glancing angle X-ray powder diffraction, X-ray photoelectron spectroscopy, scanning electron microscopy and optical and electrical measurements. AZO films with an Al content of 7 at.% were found to have favourable transparent conducting oxide properties with simultaneous high transparency (> 80%) in the visible light region and a low electrical resistivity (1.96 × 10− 3 Ω cm).
| Type: | Article |
|---|---|
| Title: | Aerosol assisted chemical vapour deposition of transparent conductive aluminum-doped zinc oxide thin films from a zinc triflate precursor |
| Open access status: | An open access version is available from UCL Discovery |
| DOI: | 10.1016/j.tsf.2016.09.008 |
| Publisher version: | http://doi.org/10.1016/j.tsf.2016.09.008 |
| Language: | English |
| Additional information: | © 2016 Elsevier B.V. All rights reserved. This manuscript version is made available under a Creative Commons Attribution Non-commercial Non-derivative 4.0 International license (CC BY-NC-ND 4.0). This license allows you to share, copy, distribute and transmit the work for personal and non-commercial use providing author and publisher attribution is clearly stated. Further details about CC BY licenses are available at https://creativecommons.org/licenses/. Access may be initially restricted by the publisher. |
| Keywords: | Science & Technology, Technology, Physical Sciences, Materials Science, Multidisciplinary, Materials Science, Coatings & Films, Physics, Applied, Physics, Condensed Matter, Materials Science, Physics, Zinc oxide, Zinc triflate, Transparent conducting oxide, Thin films, Aerosol assisted chemical vapour deposition, PULSED-LASER DEPOSITION, INDIUM-TIN-OXIDE, OPTICAL BAND-GAP, ZNO FILMS, ELECTRICAL-PROPERTIES, CVD, GROWTH, MOCVD, TEMPERATURE, FABRICATION |
| UCL classification: | UCL UCL > Provost and Vice Provost Offices > UCL BEAMS UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences > Dept of Chemistry |
| URI: | https://discovery.ucl.ac.uk/id/eprint/1534469 |
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