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Synthesis and material characterization of amorphous and crystalline (alpha-) Al2O3 via aerosol assisted chemical vapour deposition

Ponja, SD; Parkin, IP; Carmalt, CJ; (2016) Synthesis and material characterization of amorphous and crystalline (alpha-) Al2O3 via aerosol assisted chemical vapour deposition. RSC Advances , 6 (105) pp. 102956-102960. 10.1039/c6ra24018f. Green open access

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Abstract

The facile synthesis of Al2O3 in the amorphous and corundum phase on both glass and quartz substrates is reported. The synthesis was carried out via aerosol assisted chemical vapour deposition using Al(acac)3 and methanol. The films were analyzed using XRD, SEM, UV-vis spectroscopy and XPS. The coatings were highly crystalline (when annealed) with low carbon contamination levels and a relatively featureless morphology that gave rise to ultra high transparency in the UV, visible and near IR portions of the electromagnetic spectrum.

Type: Article
Title: Synthesis and material characterization of amorphous and crystalline (alpha-) Al2O3 via aerosol assisted chemical vapour deposition
Open access status: An open access version is available from UCL Discovery
DOI: 10.1039/c6ra24018f
Publisher version: http://dx.doi.org/10.1039/c6ra24018f
Language: English
Additional information: © Royal Society of Chemistry
Keywords: Science & Technology, Physical Sciences, Chemistry, Multidisciplinary, Chemistry, Oxide Films, Thin-Films, Aluminum, Cvd, Growth
UCL classification: UCL
UCL > Provost and Vice Provost Offices > UCL BEAMS
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences > Dept of Chemistry
URI: https://discovery.ucl.ac.uk/id/eprint/1532210
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