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Humidity effects on tribochemical removal of GaAs surfaces

Yu, B; Gao, J; Jin, C; Xiao, C; Wu, J; Liu, H; Jiang, S; ... Qian, L; + view all (2016) Humidity effects on tribochemical removal of GaAs surfaces. Applied Physics Express , 9 (6) , Article 066703. 10.7567/APEX.9.066703. Green open access

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Abstract

Defect-free tribochemical removal of gallium arsenide (GaAs) was demonstrated in vacuum, dry air, and various humidity environments by scratching with a SiO2 tip. The removal depth increases with increasing relative humidity (1–90%), and reaches its maximum value in water. A perfect crystal matrix without defects was observed in the cross section of the scratched groove using a transmission electron microscope. A model based on reactive tip scratching-induced oxidation, water solubility of debris, and adhesion effect was proposed to interpret tribochemical removal of GaAs surface. This study provides new insights into defect-free and site-controlled nanofabrication of GaAs.

Type: Article
Title: Humidity effects on tribochemical removal of GaAs surfaces
Open access status: An open access version is available from UCL Discovery
DOI: 10.7567/APEX.9.066703
Publisher version: http://doi.org/10.7567/APEX.9.066703
Language: English
Additional information: © 2016 The Japan Society of Applied Physics. This is an author-created, un-copyedited version of an article accepted for publication/published in Applied Physics Express. IOP Publishing Ltd is not responsible for any errors or omissions in this version of the manuscript or any version derived from it. The Version of Record is available online at http://doi.org/10.7567/APEX.9.066703
Keywords: Science & Technology, Physical Sciences, Physics, Applied, Physics, SOLAR-CELLS, QUANTUM, NANOFABRICATION, NANOWEAR, SILICON
UCL classification: UCL
UCL > Provost and Vice Provost Offices > UCL BEAMS
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Engineering Science
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Engineering Science > Dept of Electronic and Electrical Eng
URI: https://discovery.ucl.ac.uk/id/eprint/1510213
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