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Design and Fabrication of Suspended Indium Phosphide Waveguides for MEMS-Actuated Optical Buffering

Ng, WH; Podoliak, N; Horak, P; Wu, J; Liu, H; Stewart, WJ; Kenyon, AJ; (2015) Design and Fabrication of Suspended Indium Phosphide Waveguides for MEMS-Actuated Optical Buffering. IEEE Journal of Selected Topics in Quantum Electronics , 21 (4) 10.1109/JSTQE.2014.2384514. Green open access

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Abstract

We present the design and fabrication of suspended optical waveguides on indium phosphide platform for use in an optical buffer device with MEMS actuation, in which the optical delay can be achieved by changing the spacing of the waveguides by electrostatic actuation. The optical and mechanical properties of the waveguides and pillar supports are modeled, and different MEMS actuation schemes are simulated. We also present fabrication and characterization results of the epitaxially grown sample structure and of the suspended waveguide device, exhibiting two parallel waveguides with submicron dimensions separated by a 400-nm air gap, and suspended at 40-μm intervals by S-shaped supports.

Type: Article
Title: Design and Fabrication of Suspended Indium Phosphide Waveguides for MEMS-Actuated Optical Buffering
Open access status: An open access version is available from UCL Discovery
DOI: 10.1109/JSTQE.2014.2384514
Publisher version: http://dx.doi.org/10.1109/JSTQE.2014.2384514
Language: English
Additional information: Copyright © 2014 IEEE. This is an Open Access article.
Keywords: Optical waveguides, Optical buffering, Optical device fabrication, Optical resonators, Waveguide discontinuities, Optical surface waves, Indium phosphide, optical waveguides, III-V semiconductor materials, indium phosphide, microelectromechanical systems, optical buffering
UCL classification: UCL
UCL > Provost and Vice Provost Offices > UCL BEAMS
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Engineering Science
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Engineering Science > Dept of Electronic and Electrical Eng
URI: https://discovery.ucl.ac.uk/id/eprint/1460270
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