Kim, E; Vaynzof, Y; Sepe, A; Guldin, S; Scherer, M; Cunha, P; Roth, SV; Kim, E; Vaynzof, Y; Sepe, A; Guldin, S; Scherer, M; Cunha, P; Roth, SV; Steiner, U; - view fewer (2014) Gyroid-Structured 3D ZnO Networks Made by Atomic Layer Deposition. Advanced Functional Materials , 24 (6) 863 - 872. 10.1002/adfm.201302238.

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Abstract

3D continuous ZnO morphologies with characteristic feature sizes on the 10 nm length scale are attractive for electronic device manufacture. However, their synthesis remains a challenge because of the low crystallization temperature of ZnO. Here, we report a method for the robust and reliable synthesis of fully crystalline 3D mesoporous ZnO networks by means of atomic layer deposition (ALD) of ZnO into a self-assembled block copolymer template. By carefully optimizing the processing conditions we are able to synthesize several-micrometer-thick layers of mesoporous ZnO networks with a strut width of 30 nm. Two 3D mesoporous morphologies are manufactured: a periodic gyroid structure and a random worm-like morphology. Exploiting the ALD property to conformally coat complex surfaces of high aspect ratio, the channel network of a 3D continuous channel network of a self-assembled block copolymer is replicated into ZnO. X-ray photoemission spectroscopy and x-ray diffraction measurements reveal that the chemical composition of the mesoporous structures is uniform and consists of wurtzite-ZnO throughout the film. Scanning electron microscopy reveals an average pore dimension of 30 nm. The potential of this material for a hybrid photovoltaic application is demonstrated by the manufacture of a poly(3-hexylthiophene)/ZnO solar cell.

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