UCL Discovery
UCL home » Library Services » Electronic resources » UCL Discovery

The gas-sensing properties of WO3-x thin films deposited via the atmospheric pressure chemical vapour deposition (APCVD) of WCl6 with ethanol

Ashraf, S; Blackman, CS; Naisbitt, SC; Parkin, IP; (2008) The gas-sensing properties of WO3-x thin films deposited via the atmospheric pressure chemical vapour deposition (APCVD) of WCl6 with ethanol. Measurement Science and Technology , 19 (2) , Article 025203. 10.1088/0957-0233/19/2/025203. Green open access

[img] PDF
143109.pdf

Download (1MB)

Abstract

The use of the APCVD reaction of WCl6 with ethanol to produce tungsten oxide films (3600-6700 nm thick) for use as gas sensors is presented. The response of these films to varying concentrations of ethanol and NO2 at varying temperatures has been examined. A comparison of the CVD sensors to a thick film (similar to 60 mu m) screen-printed sensor has shown that the CVD sensors have a faster rate of response, a stable sensing response and faster return to baseline with no drift at the conditions examined.

Type: Article
Title: The gas-sensing properties of WO3-x thin films deposited via the atmospheric pressure chemical vapour deposition (APCVD) of WCl6 with ethanol
Open access status: An open access version is available from UCL Discovery
DOI: 10.1088/0957-0233/19/2/025203
Publisher version: http://dx.doi.org/10.1088/0957-0233/19/2/025203
Language: English
Additional information: This is an author-created, un-copyedited version of an article accepted for publication in Measurement Science and Technology. IOP Publishing Ltd is not responsible for any errors or omissions in this version of the manuscript or any version derived from it. The Version of Record is available online at http://dx.doi.org/10.1088/0957-0233/19/2/025203
Keywords: CVD, tungsten oxide, TUNGSTEN-OXIDE, CARBON-MONOXIDE, SENSOR, MODEL
UCL classification: UCL
UCL > Provost and Vice Provost Offices
UCL > Provost and Vice Provost Offices > UCL BEAMS
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences > Dept of Chemistry
URI: https://discovery.ucl.ac.uk/id/eprint/143109
Downloads since deposit
1,112Downloads
Download activity - last month
Download activity - last 12 months
Downloads by country - last 12 months

Archive Staff Only

View Item View Item