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Direct and alignment-insensitive measurement of cantilever curvature

Hermans, RI; Bailey, JM; Aeppli, G; (2013) Direct and alignment-insensitive measurement of cantilever curvature. Applied Physics Letters , 103 (3) , Article 034103. 10.1063/1.4813265. Green open access

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Abstract

We analytically derive and experimentally demonstrate a method for the simultaneous measurement of deflection for large arrays of cantilevers. The Fresnel diffraction patterns of a cantilever independently reveal tilt, curvature, cubic, and higher order bending of the cantilever. It provides a calibrated absolute measurement of the polynomial coefficients describing the cantilever shape, without careful alignment and could be applied to several cantilevers simultaneously with no added complexity. We show that the method is easily implemented, works in both liquid media and in air, for a broad range of displacements and is especially suited to the requirements for multi-marker biosensors.

Type: Article
Title: Direct and alignment-insensitive measurement of cantilever curvature
Open access status: An open access version is available from UCL Discovery
DOI: 10.1063/1.4813265
Publisher version: http://dx.doi.org/10.1063/1.4813265
Language: English
Additional information: The following article appeared in: Hermans, RI; Bailey, JM; Aeppli, G; (2013) Direct and alignment-insensitive measurement of cantilever curvature. Applied Physics Letters, 103 (3), Article 034103, and may be found at: http://dx.doi.org/10.1063/1.4813265.
Keywords: Polynomials, Bending, Illumination, Laser beams, Light emitting diodes
UCL classification: UCL
UCL > Provost and Vice Provost Offices
UCL > Provost and Vice Provost Offices > UCL BEAMS
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Engineering Science
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Engineering Science > Dept of Electronic and Electrical Eng
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences
URI: https://discovery.ucl.ac.uk/id/eprint/1404031
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