Noor, N;
Parkin, IP;
(2013)
Halide doping effects on transparent conducting oxides formed by aerosol assisted chemical vapour deposition.
THIN SOLID FILMS
, 532
26 - 30.
10.1016/j.tsf.2012.10.110.
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Abstract
We report on the effect of halide doping on the Aerosol-assisted Chemical Vapour Deposition of tin oxide. Specifically, the importance of precursor interactions is highlighted. A halide exchange reaction involving part substitution of the tin precursor is believed to occur in the solvent; the complex acting as a marker for improved films with improved transparent-conducting properties. Precursor mixtures of butyltin trichloride and potassium halide (X = F, Cl, Br, I) in propan-2-ol were deposited at a substrate temperature of 450 °C using air carrier gas. Hall Effect results indicate that fluorine gave the best performing n-type transparent conducting thin films that exhibited high optical transparency (> 80% at 550 nm) and resistivity values of 4.9 × 10− 4 Ω.cm, with charge carrier density and carrier mobility values of 8.85 × 1020 cm− 3 and 15 cm3/V.s respectively. Such parameters yield high figures of merit.
| Type: | Article |
|---|---|
| Title: | Halide doping effects on transparent conducting oxides formed by aerosol assisted chemical vapour deposition |
| Open access status: | An open access version is available from UCL Discovery |
| DOI: | 10.1016/j.tsf.2012.10.110 |
| Publisher version: | http://dx.doi.org/10.1016/j.tsf.2012.10.110 |
| Language: | English |
| Additional information: | This is an open-access article distributed under the terms of the Creative Commons Attribution License (CC BY), which permits unrestricted use, distribution, and reproduction in any medium, provided the original author and source are credited. |
| Keywords: | Transparent conducting oxide, Chemical vapour deposition, Fluorine-doped tin oxide, Thin film, Tin oxide, Halide exchange, Aerosol |
| UCL classification: | UCL UCL > Provost and Vice Provost Offices UCL > Provost and Vice Provost Offices > UCL BEAMS UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences |
| URI: | https://discovery.ucl.ac.uk/id/eprint/1393190 |
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