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Felling of individual freestanding nanoobjects using focused-ion-beam milling for investigations of structural and transport properties

Li, W; Fenton, JC; Cui, A; Wang, H; Wang, Y; Gu, C; McComb, DW; (2012) Felling of individual freestanding nanoobjects using focused-ion-beam milling for investigations of structural and transport properties. Nanotechnology , 23 (10) , Article 105301. 10.1088/0957-4484/23/10/105301. Green open access

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Abstract

We report that, to enable studies of their compositional, structural and electrical properties, freestanding individual nanoobjects can be selectively felled in a controllable way by the technique of low-current focused-ion-beam (FIB) milling with the ion beam at a chosen angle of incidence to the nanoobject. To demonstrate the suitability of the technique, we report results zigzag/straight tungsten nanowires grown vertically on support substrates and then felled for characterization. We also describe a systematic investigation of the effect of the experimental geometry and parameters on the felling process and on the induced wire-bending phenomenon. The method of felling freestanding nanoobjects using FIB is an advantageous new technique for enabling investigations of the properties of selected individual nanoobjects.

Type: Article
Title: Felling of individual freestanding nanoobjects using focused-ion-beam milling for investigations of structural and transport properties
Open access status: An open access version is available from UCL Discovery
DOI: 10.1088/0957-4484/23/10/105301
Publisher version: http://dx.doi.org/10.1088/0957-4484/23/10/105301
Language: English
Additional information: This is an author-created, un-copyedited version of an article accepted for publication in Nanotechnology. IOP Publishing Ltd is not responsible for any errors or omissions in this version of the manuscript or any version derived from it. The Version of Record is available online at DOI: 10.1088/0957-4484/23/10/105301
UCL classification: UCL
UCL > Provost and Vice Provost Offices > UCL BEAMS
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Engineering Science
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences > London Centre for Nanotechnology
URI: https://discovery.ucl.ac.uk/id/eprint/1341004
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