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Variability sources and reliability of 3D-FeFETs

Pešić, Milan; Beltrando, Bastien; Padovani, Andrea; Gangopadhyay, Shruba; Kaliappan, Muthukumar; Haverty, Michael; Villena, Marco A; ... Shluger, Alexander L; + view all (2021) Variability sources and reliability of 3D-FeFETs. In: 2021 IEEE International Reliability Physics Symposium (IRPS). IEEE: Monterey, CA, USA. Green open access

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Abstract

Discovery of ferroelectricity (FE) in binary oxides enables the advent of FE memories and a plethora of novel CMOS compatible building blocks spanning from the logic domain to high-density storage and neuromorphic computing. In this paper we develop the first comprehensive model of vertical Ferroelectric Field Effect Transistor, V-FeFET, to identify sources of variability, understand retention problems, and point a path to improving reliability and enabling high-density storage FE memories with extended endurance.

Type: Proceedings paper
Title: Variability sources and reliability of 3D-FeFETs
Event: 2021 IEEE International Reliability Physics Symposium (IRPS)
Dates: 21 Mar 2021 - 25 Mar 2021
ISBN-13: 978-1-7281-6893-7
Open access status: An open access version is available from UCL Discovery
DOI: 10.1109/IRPS46558.2021.9405118
Publisher version: http://dx.doi.org/10.1109/irps46558.2021.9405118
Language: English
Additional information: This version is the author accepted manuscript. For information on re-use, please refer to the publisher’s terms and conditions.
Keywords: V-FeFET, Ferroelectrics, HfOx, IGZO, Modeling, 3D-NAND
UCL classification: UCL
UCL > Provost and Vice Provost Offices > UCL BEAMS
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences > Dept of Physics and Astronomy
URI: https://discovery.ucl.ac.uk/id/eprint/10188323
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