Comis, F;
Ruocco, A;
(2021)
Fabrication tolerant design of silicon nitride Kerr comb generators.
In:
Proceedings of the SPIE Volume 11880, Emerging Applications in Silicon Photonics II; 118800F.
SPIE: Glasgow, Scotland, United Kingdom.
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Abstract
We propose a solution to implement a simulation routine suitable for the design of fabrication-tolerant Kerr-comb generators by looking at the waveguides' geometry affected by the tolerance. The multiparameter-space analysis highlighted that while several waveguide cross-sections are suitable for the comb generation, they don't all provide the same safety buffer toward the fabrication variability. Thus, some designs are preferred to other suitable ones. This approach paves the way to high yield, scalable and fabrication-tolerant integrated Kerr comb generators (KCGs) manufactured in complementary metal-oxide-semiconductor (CMOS) foundries.
| Type: | Proceedings paper |
|---|---|
| Title: | Fabrication tolerant design of silicon nitride Kerr comb generators |
| Event: | SPIE Photonex, 2021 |
| ISBN-13: | 9781510646049 |
| Open access status: | An open access version is available from UCL Discovery |
| DOI: | 10.1117/12.2601583 |
| Language: | English |
| Additional information: | This version is the version of record. For information on re-use, please refer to the publisher’s terms and conditions. |
| UCL classification: | UCL UCL > Provost and Vice Provost Offices > UCL BEAMS UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Engineering Science UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Engineering Science > Dept of Electronic and Electrical Eng |
| URI: | https://discovery.ucl.ac.uk/id/eprint/10139460 |
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