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Dissolvable Template Nanoimprint Lithography: A Facile and Versatile Nanoscale Replication Technique

Oh, J; Hoffman, JB; Hong, S; Jo, KD; Roman-Kustas, J; Reed, JH; Dana, CE; ... Miljkovic, N; + view all (2020) Dissolvable Template Nanoimprint Lithography: A Facile and Versatile Nanoscale Replication Technique. Nano Letters , 20 (10) pp. 6989-6997. 10.1021/acs.nanolett.0c01547.

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Abstract

Nanoimprinting lithography (NIL) is a next-generation nanofabrication method, capable of replicating nanostructures from original master surfaces. Here, we develop highly scalable, simple, and nondestructive NIL using a dissolvable template. Termed dissolvable template nanoimprinting lithography (DT-NIL), our method utilizes an economic thermoplastic resin to fabricate nanoimprinting templates, which can be easily dissolved in simple organic solvents. We used the DT-NIL method to replicate cicada wings which have surface nanofeatures of ∼100 nm in height. The master, template, and replica surfaces showed a >∼94% similarity based on the measured diameter and height of the nanofeatures. The versatility of DT-NIL was also demonstrated with the replication of re-entrant, multiscale, and hierarchical features on fly wings, as well as hard silicon wafer-based artificial nanostructures. The DT-NIL method can be performed under ambient conditions with inexpensive materials and equipment. Our work opens the door to opportunities for economical and high-throughput nanofabrication processes.

Type: Article
Title: Dissolvable Template Nanoimprint Lithography: A Facile and Versatile Nanoscale Replication Technique
DOI: 10.1021/acs.nanolett.0c01547
Publisher version: https://doi.org/10.1021/acs.nanolett.0c01547
Language: English
Additional information: This version is the author accepted manuscript. For information on re-use, please refer to the publisher’s terms and conditions.
Keywords: Nanoimprinting, template, insect wing, nanostructures, nanomanufacturing
UCL classification: UCL
UCL > Provost and Vice Provost Offices > UCL BEAMS
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Engineering Science
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Engineering Science > Dept of Mechanical Engineering
URI: https://discovery.ucl.ac.uk/id/eprint/10139026
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