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Comparative study of spin-coated and vapour deposited nickel oxides for detecting VOCs

Ayyala, SK; Tsang, JH; Blackman, C; Covington, JA; (2020) Comparative study of spin-coated and vapour deposited nickel oxides for detecting VOCs. In: Proceedings of 2020 IEEE SENSORS. IEEE: Rotterdam, Netherlands. Green open access

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Abstract

Nickel oxide (p-type) sensors are developed to detect volatile organic compounds (VOCs). In the presented work, NiO sensors are fabricated and tested towards acetone, ethanol, toluene, hexane, methanol, and n-propanol vapours between 5 to 25 parts-per-million concentrations, under both dry and humid conditions. NiO films are deposited onto alumina substrates using both spin-coating (SC) and vapour deposition (AACVD) methods. The measured thickness of the spin coated and AACVD NiO films are approximately comparable at 10.3 μm and 6.7 μm, respectively. Both SC and AACVD sensors showed a maximum response at 350°C. No significant influence of humidity was observed on sensor response and baseline resistance for either SC or AACVD sensors. The sensitivity is found to be highest for ethanol, acetone, and methanol vapours than the rest.

Type: Proceedings paper
Title: Comparative study of spin-coated and vapour deposited nickel oxides for detecting VOCs
Event: 2020 IEEE SENSORS
ISBN-13: 978-1-7281-6801-2
Open access status: An open access version is available from UCL Discovery
DOI: 10.1109/SENSORS47125.2020.9278881
Publisher version: https://doi.org/10.1109/SENSORS47125.2020.9278881
Language: English
Additional information: This version is the author accepted manuscript. For information on re-use, please refer to the publisher’s terms and conditions.
Keywords: metal oxides, spin coating, NiO, volatile organic compounds, gas sensors
UCL classification: UCL
UCL > Provost and Vice Provost Offices > UCL BEAMS
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences > Dept of Chemistry
URI: https://discovery.ucl.ac.uk/id/eprint/10121521
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