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Low Temperature Plasma-Enhanced ALD of Metal Oxide Thin Films

Potts, SE; Van den Elzen, LRJG; Dingemans, G; Langereis, E; Keuning, W; Van de Sanden, MCM; Kessels, WMM; (2009) Low Temperature Plasma-Enhanced ALD of Metal Oxide Thin Films. Presented at: Baltic ALD Conference 2009, Uppsala, Sweden. Green open access

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Type: Conference item (Presentation)
Title: Low Temperature Plasma-Enhanced ALD of Metal Oxide Thin Films
Event: Baltic ALD Conference 2009
Location: Uppsala, Sweden
Dates: 15 - 16 June 2009
Open access status: An open access version is available from UCL Discovery
Publisher version: http://aldhistory.blogspot.com/p/ald-conferences.h...
Language: English
UCL classification: UCL
UCL > Provost and Vice Provost Offices > UCL BEAMS
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences > Dept of Chemistry
URI: https://discovery.ucl.ac.uk/id/eprint/10114903
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