Potts, SE;
Hermkens, PM;
García-Alonso, D;
Kessels, E;
Lachaud, C;
(2012)
Non-Pyrophoric Al Precursor for the ALD of Al₂O₃ and Al-Doped ZnO.
Presented at: AVS ALD Conference 2012, Dresden, Germany.
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| Type: | Conference item (Presentation) |
|---|---|
| Title: | Non-Pyrophoric Al Precursor for the ALD of Al₂O₃ and Al-Doped ZnO |
| Event: | AVS ALD Conference 2012 |
| Location: | Dresden, Germany |
| Dates: | 18 - 20 June 2012 |
| Open access status: | An open access version is available from UCL Discovery |
| Publisher version: | https://www.pathlms.com/avstechnicallibrary/events... |
| Language: | English |
| UCL classification: | UCL UCL > Provost and Vice Provost Offices > UCL BEAMS UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences > Dept of Chemistry |
| URI: | https://discovery.ucl.ac.uk/id/eprint/10114896 |
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