Potts, SE;
Profijt, HB;
Roelofs, R;
Braeken, E;
Knoops, HCM;
Kessels, WMM;
Pore, V;
(2013)
Room-Temperature ALD of Al₂O₃, TiO₂, SiO₂ and SiNₓ Enabled by Energy-Enhanced ALD Techniques.
Presented at: AVS-ALD Conference 2013, San Diego, CA, USA.
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| Type: | Conference item (UNSPECIFIED) |
|---|---|
| Title: | Room-Temperature ALD of Al₂O₃, TiO₂, SiO₂ and SiNₓ Enabled by Energy-Enhanced ALD Techniques |
| Event: | AVS-ALD Conference 2013 |
| Location: | San Diego, CA, USA |
| Dates: | 28 - 31 July 2013 |
| Open access status: | An open access version is available from UCL Discovery |
| Publisher version: | https://www.pathlms.com/avstechnicallibrary/events... |
| Language: | English |
| UCL classification: | UCL UCL > Provost and Vice Provost Offices > UCL BEAMS UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences > Dept of Chemistry |
| URI: | https://discovery.ucl.ac.uk/id/eprint/10114890 |
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