Potts, SE;
(2015)
Low-Temperature ALD: What's Limiting?
Presented at: ALD FUNdamentals Workshop, Eindhoven, Netherlands.
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| Type: | Conference item (Presentation) |
|---|---|
| Title: | Low-Temperature ALD: What's Limiting? |
| Event: | ALD FUNdamentals Workshop |
| Location: | Eindhoven, Netherlands |
| Dates: | 08 - 09 June 2015 |
| Open access status: | An open access version is available from UCL Discovery |
| Publisher version: | https://www.aldacademy.com/ |
| Language: | English |
| UCL classification: | UCL UCL > Provost and Vice Provost Offices > UCL BEAMS UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences > Dept of Chemistry |
| URI: | https://discovery.ucl.ac.uk/id/eprint/10114889 |
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