Murawski, K;
Aristovich, K;
Lancashire, H;
(2021)
Selective laser sintering of glass-ceramic bonds using a defocused Nd:YAG laser.
In:
International Symposium on Microelectronics (2020) 2020 (1).
(pp. 000286-000290).
IMAPS
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Abstract
Protecting miniature implantable electronics may require mm scale hermetic packages. Glass-ceramic bonding by selective laser sintering of glass sealing paste using a defocused Nd:YAG laser is presented. Glass sealing paste (FX11-036, Ferro) is screen printed onto alumina ceramic, clamped in contact with borosilicate glass, and laser treated while heating to 250°C. With the addition of defocusing and a heat source the glass paste reflowed and wetted both the alumina and coverslip surfaces, with an optimal effect between 10 mm and 15 mm defocusing. This method is promising to create electrically non-conductive hermetic seals at the mm scale.
| Type: | Proceedings paper |
|---|---|
| Title: | Selective laser sintering of glass-ceramic bonds using a defocused Nd:YAG laser |
| Event: | International Symposium on Microelectronics 2020 |
| Dates: | 05 October 2020 - 08 October 2020 |
| Open access status: | An open access version is available from UCL Discovery |
| DOI: | 10.4071/2380-4505-2020.1.000286 |
| Publisher version: | https://doi.org/10.4071/2380-4505-2020.1.000286 |
| Language: | English |
| Additional information: | This version is the author accepted manuscript. For information on re-use, please refer to the publisher’s terms and conditions. |
| Keywords: | Nd:YAG laser, Glass, Sealing |
| UCL classification: | UCL UCL > Provost and Vice Provost Offices > UCL BEAMS UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Engineering Science UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Engineering Science > Dept of Med Phys and Biomedical Eng |
| URI: | https://discovery.ucl.ac.uk/id/eprint/10113253 |
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