Sparks, MJ;
Kennedy, OW;
Warburton, PA;
(2020)
Rapid Thermal Annealing for Surface Optimisation of ZnO Substrates for MBE-Grown Oxide Two-Dimensional Electron Gases.
Crystals
, 10
(9)
, Article 776. 10.3390/cryst10090776.
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Abstract
Two-dimensional electron gases (2DEGs) at the ZnO/ZnMgO interface are promising for applications in spintronics and quantum computing due to the combination of low spin-orbit coupling and high electron mobility. Growing high mobility 2DEGs requires high quality substrates with low impurity densities. In this work we demonstrate a ZnO substrate sample treatment combining high temperature rapid thermal annealing and chemical etching to improve the surface quality for the subsequent growth of 2DEGs. This process enables the growth of a 2DEG with low-temperature mobility of 4.8 x 10^{4} cm^{2}V^{-1}s^{-1}. An unannealed control sample shows a scattering rate at least three times greater than the annealed sample.
| Type: | Article |
|---|---|
| Title: | Rapid Thermal Annealing for Surface Optimisation of ZnO Substrates for MBE-Grown Oxide Two-Dimensional Electron Gases |
| Open access status: | An open access version is available from UCL Discovery |
| DOI: | 10.3390/cryst10090776 |
| Publisher version: | https://doi.org/10.3390/cryst10090776 |
| Language: | English |
| Additional information: | © 2020 by the Authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/). |
| Keywords: | ZnO; heterostructure; 2DEG; molecular beam epitaxy; semiconductor II-VI material |
| UCL classification: | UCL UCL > Provost and Vice Provost Offices UCL > Provost and Vice Provost Offices > UCL BEAMS UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Engineering Science UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Engineering Science > Dept of Chemical Engineering UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences > London Centre for Nanotechnology |
| URI: | https://discovery.ucl.ac.uk/id/eprint/10110350 |
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