Caroselli, R;
Martin Sanchez, D;
Ponce Alcantara, S;
Prats Quilez, F;
Torrijos Moran, L;
Garcia-Ruperez, J;
(2017)
Real-Time and In-Flow Sensing Using a High Sensitivity Porous Silicon Microcavity-Based Sensor.
Sensors
, 17
(12)
, Article 2813. 10.3390/s17122813.
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Abstract
Porous silicon seems to be an appropriate material platform for the development of high-sensitivity and low-cost optical sensors, as their porous nature increases the interaction with the target substances, and their fabrication process is very simple and inexpensive. In this paper, we present the experimental development of a porous silicon microcavity sensor and its use for real-time in-flow sensing application. A high-sensitivity configuration was designed and then fabricated, by electrochemically etching a silicon wafer. Refractive index sensing experiments were realized by flowing several dilutions with decreasing refractive indices, and measuring the spectral shift in real-time. The porous silicon microcavity sensor showed a very linear response over a wide refractive index range, with a sensitivity around 1000 nm/refractive index unit (RIU), which allowed us to directly detect refractive index variations in the 10^{-7} RIU range.
| Type: | Article |
|---|---|
| Title: | Real-Time and In-Flow Sensing Using a High Sensitivity Porous Silicon Microcavity-Based Sensor |
| Open access status: | An open access version is available from UCL Discovery |
| DOI: | 10.3390/s17122813 |
| Publisher version: | https://doi.org/10.3390/s17122813 |
| Language: | English |
| Additional information: | © 2017 by the Authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/). |
| Keywords: | photonic sensor; porous silicon; Bragg reflector; microcavity; real-time sensing; in-flow sensing |
| UCL classification: | UCL UCL > Provost and Vice Provost Offices > UCL BEAMS UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Engineering Science UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Engineering Science > Dept of Med Phys and Biomedical Eng |
| URI: | https://discovery.ucl.ac.uk/id/eprint/10083001 |
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