Ou, Y;
Qu, F;
Wang, G;
Nie, M;
Li, Z;
Ou, W;
Xie, C;
(2016)
A MEMS thermal shear stress sensor produced by a combination of substrate-free structures with anodic bonding technology.
Applied Physics Letters
, 109
(2)
10.1063/1.4958842.
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Abstract
By combining substrate-free structures with anodic bonding technology, we present a simple and effi- cient micro-electro-mechanical system (MEMS) thermal shear stress sensor. Significantly, the resulting depth of the vacuum cavity of the sensor is determined by the thickness of the silicon substrate at which Si is removed by the anisotropic wet etching process. Compared with the sensor based on a sacrificial layer technique, the proposed MEMS thermal shear-stress sensor exhibits dramatically improved sensitivity due to the much larger vacuum cavity depth. The fabricated MEMS thermal shear-stress sensor with a vacuum cavity depth as large as 525 lm and a vacuum of 5 102 Pa exhibits a sensitivity of 184.5 mV/Pa and a response time of 180 ls. We also experimentally demonstrate that the sensor power is indeed proportional to the 1/3-power of the applied shear stress. The substrate-free structures offer the ability to precisely measure the shear stress fluctuations in low speed turbulent boundary layer wind tunnels.
Type: | Article |
---|---|
Title: | A MEMS thermal shear stress sensor produced by a combination of substrate-free structures with anodic bonding technology |
Open access status: | An open access version is available from UCL Discovery |
DOI: | 10.1063/1.4958842 |
Publisher version: | http://dx.doi.org/10.1063/1.4958842 |
Language: | English |
Additional information: | This version is the version of record. For information on re-use, please refer to the publisher’s terms and conditions. |
Keywords: | Science & Technology, Physical Sciences, Physics, Applied, Physics, PRESSURE |
UCL classification: | UCL UCL > Provost and Vice Provost Offices > UCL BEAMS UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences > MAPS Faculty Office UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences > MAPS Faculty Office > Institute for Materials Discovery |
URI: | https://discovery.ucl.ac.uk/id/eprint/10048199 |
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