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A MEMS thermal shear stress sensor produced by a combination of substrate-free structures with anodic bonding technology

Ou, Y; Qu, F; Wang, G; Nie, M; Li, Z; Ou, W; Xie, C; (2016) A MEMS thermal shear stress sensor produced by a combination of substrate-free structures with anodic bonding technology. Applied Physics Letters , 109 (2) 10.1063/1.4958842. Green open access

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Abstract

By combining substrate-free structures with anodic bonding technology, we present a simple and effi- cient micro-electro-mechanical system (MEMS) thermal shear stress sensor. Significantly, the resulting depth of the vacuum cavity of the sensor is determined by the thickness of the silicon substrate at which Si is removed by the anisotropic wet etching process. Compared with the sensor based on a sacrificial layer technique, the proposed MEMS thermal shear-stress sensor exhibits dramatically improved sensitivity due to the much larger vacuum cavity depth. The fabricated MEMS thermal shear-stress sensor with a vacuum cavity depth as large as 525 lm and a vacuum of 5 102 Pa exhibits a sensitivity of 184.5 mV/Pa and a response time of 180 ls. We also experimentally demonstrate that the sensor power is indeed proportional to the 1/3-power of the applied shear stress. The substrate-free structures offer the ability to precisely measure the shear stress fluctuations in low speed turbulent boundary layer wind tunnels.

Type: Article
Title: A MEMS thermal shear stress sensor produced by a combination of substrate-free structures with anodic bonding technology
Open access status: An open access version is available from UCL Discovery
DOI: 10.1063/1.4958842
Publisher version: http://dx.doi.org/10.1063/1.4958842
Language: English
Additional information: This version is the version of record. For information on re-use, please refer to the publisher’s terms and conditions.
Keywords: Science & Technology, Physical Sciences, Physics, Applied, Physics, PRESSURE
UCL classification: UCL
UCL > Provost and Vice Provost Offices > UCL BEAMS
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences > MAPS Faculty Office
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences > MAPS Faculty Office > Institute for Materials Discovery
URI: https://discovery.ucl.ac.uk/id/eprint/10048199
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