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Nanoimaging using soft X-ray and EUV laser-plasma sources

Wachulak, P; Torrisi, A; Ayele, M; Bartnik, A; Czwartos, J; Wȩgrzyński, Ł; Fok, T; (2018) Nanoimaging using soft X-ray and EUV laser-plasma sources. In: Torrisi, L and Cutroneo, M, (eds.) EPJ Web of Conferences 2018, Plasma Physics by Laser and Applications (PPLA 2017). EDP Sciences: Messina, Italy. Green open access

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Abstract

In this work we present three experimental, compact desk-top imaging systems: SXR and EUV full field microscopes and the SXR contact microscope. The systems are based on laser-plasma EUV and SXR sources based on a double stream gas puff target. The EUV and SXR full field microscopes, operating at 13.8 nm and 2.88 nm wavelengths are capable of imaging nanostructures with a sub-50 nm spatial resolution and short (seconds) exposure times. The SXR contact microscope operates in the "water-window" spectral range and produces an imprint of the internal structure of the imaged sample in a thin layer of SXR sensitive photoresist. Applications of such desk-top EUV and SXR microscopes, mostly for biological samples (CT26 fibroblast cells and Keratinocytes) are also presented. Details about the sources, the microscopes as well as the imaging results for various objects will be presented and discussed. The development of such compact imaging systems may be important to the new research related to biological, material science and nanotechnology applications.

Type: Proceedings paper
Title: Nanoimaging using soft X-ray and EUV laser-plasma sources
Event: EPJ Web of Conferences 2018, Plasma Physics by Laser and Applications (PPLA 2017)
Open access status: An open access version is available from UCL Discovery
DOI: 10.1051/epjconf/201816703001
Publisher version: https://doi.org/10.1051/epjconf/201816703001
Language: English
Additional information: Copyright © The Authors, published by EDP Sciences, 2018 This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (http://creativecommons.org/licenses/by/4.0/).
UCL classification: UCL
UCL > Provost and Vice Provost Offices > UCL BEAMS
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Engineering Science
URI: https://discovery.ucl.ac.uk/id/eprint/10043980
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