TY - JOUR ID - discovery1465913 N2 - The novel deposition of GaAs thin films on glass substrates from a solution based route involving the aerosol assisted chemical vapour deposition (AACVD) of As(NMe2)3 and GaMe3 dissolved in toluene is reported. The gallium arsenide films were analysed by scanning electron microscopy (SEM), X-ray powder diffraction (XRD), energy dispersive X-ray (EDX) analysis, X-ray photoelectron spectroscopy (XPS) and Raman spectroscopy. Powder XRD showed that cubic polycrystalline GaAs had been deposited with films grown at the higher temperatures having a Ga to As ratio of 1 : 1. EDX mapping, XPS depth profiling and SIMS showed that the films contained low levels of contaminants. The method described shows the formation of GaAs films with increasing crystallinity and stoichiometry reaching unity with increasing deposition temperature. SN - 2046-2069 UR - http://dx.doi.org/10.1039/c4ra13902j JF - RSC Advances KW - Gallium arsenide KW - AACVD KW - solution processing KW - photovoltaics A1 - Sathasivam, S A1 - Arnepalli, RR A1 - Singh, KK A1 - Visser, RJ A1 - Blackman, CS A1 - Carmalt, CJ TI - A solution based route to GaAs thin films from As(NMe2)(3) and GaMe3 for solar cells EP - 11817 AV - public VL - 5 Y1 - 2015/01/21/ SP - 11812 IS - 16 ER -