%I Institute of Electrical and Electronics Engineers (IEEE)
%L discovery10204663
%T An Integrated Deep-Cryogenic Temperature Sensor in CMOS Technology for Quantum Computing Applications
%A F Olivieri
%A GM Noah
%A T Swift
%A M Fernando Gonzalez-Zalba
%A JJL Morton
%A A Gomez-Saiz
%J IEEE Transactions on Applied Superconductivity
%K Cryo-CMOS, cryogenic electronics, digital-toanalog converter (DAC), fully-depleted silicon-on-insulator (FDSOI), superconducting devices, temperature sensor
%X On-chip thermometry at deep-cryogenic temperatures is vital in quantum computing applications to accurately quantify the effect of increased temperature on qubit performance. In this work, we present a sub-1 K temperature sensor in CMOS technology based on the temperature dependence of the critical current of a superconducting (SC) thin-film. The sensor is implemented in 22-nm fully depleted silicon on insulator (FDSOI) technology and comprises a 6-nA-resolution current-output digital-to-analog converter (DAC), a transimpedance amplifier (TIA) with a SC thin-film as a gain element, and a voltage comparator. The circuit dissipates 1.5 >μ W and is demonstrated operating at ambient temperatures as low as 15 mK, providing a variable temperature resolution reaching sub-10 mK.
%O This version is the author accepted manuscript. For information on re-use, please refer to the publisher's terms and conditions.
%D 2025
%P 1-5