%I Institute of Electrical and Electronics Engineers (IEEE) %L discovery10204663 %T An Integrated Deep-Cryogenic Temperature Sensor in CMOS Technology for Quantum Computing Applications %A F Olivieri %A GM Noah %A T Swift %A M Fernando Gonzalez-Zalba %A JJL Morton %A A Gomez-Saiz %J IEEE Transactions on Applied Superconductivity %K Cryo-CMOS, cryogenic electronics, digital-toanalog converter (DAC), fully-depleted silicon-on-insulator (FDSOI), superconducting devices, temperature sensor %X On-chip thermometry at deep-cryogenic temperatures is vital in quantum computing applications to accurately quantify the effect of increased temperature on qubit performance. In this work, we present a sub-1 K temperature sensor in CMOS technology based on the temperature dependence of the critical current of a superconducting (SC) thin-film. The sensor is implemented in 22-nm fully depleted silicon on insulator (FDSOI) technology and comprises a 6-nA-resolution current-output digital-to-analog converter (DAC), a transimpedance amplifier (TIA) with a SC thin-film as a gain element, and a voltage comparator. The circuit dissipates 1.5 >μ W and is demonstrated operating at ambient temperatures as low as 15 mK, providing a variable temperature resolution reaching sub-10 mK. %O This version is the author accepted manuscript. For information on re-use, please refer to the publisher's terms and conditions. %D 2025 %P 1-5