TY - INPR EP - 5 AV - public Y1 - 2025/01/30/ SP - 1 TI - An Integrated Deep-Cryogenic Temperature Sensor in CMOS Technology for Quantum Computing Applications N1 - This version is the author accepted manuscript. For information on re-use, please refer to the publisher's terms and conditions. UR - https://doi.org/10.1109/tasc.2025.3536636 PB - Institute of Electrical and Electronics Engineers (IEEE) ID - discovery10204663 N2 - On-chip thermometry at deep-cryogenic temperatures is vital in quantum computing applications to accurately quantify the effect of increased temperature on qubit performance. In this work, we present a sub-1 K temperature sensor in CMOS technology based on the temperature dependence of the critical current of a superconducting (SC) thin-film. The sensor is implemented in 22-nm fully depleted silicon on insulator (FDSOI) technology and comprises a 6-nA-resolution current-output digital-to-analog converter (DAC), a transimpedance amplifier (TIA) with a SC thin-film as a gain element, and a voltage comparator. The circuit dissipates 1.5 >? W and is demonstrated operating at ambient temperatures as low as 15 mK, providing a variable temperature resolution reaching sub-10 mK. KW - Cryo-CMOS KW - cryogenic electronics KW - digital-toanalog converter (DAC) KW - fully-depleted silicon-on-insulator (FDSOI) KW - superconducting devices KW - temperature sensor A1 - Olivieri, F A1 - Noah, GM A1 - Swift, T A1 - Fernando Gonzalez-Zalba, M A1 - Morton, JJL A1 - Gomez-Saiz, A JF - IEEE Transactions on Applied Superconductivity ER -